Semiconductor MES Software | Real-Time Yield, Traceability, and Compliance

The Definitive CMMS Buyer’s Guide for Regulated Industries

Semiconductor MES Software for Real-Time Traceability, Yield Optimization and Compliance

Semiconductor operations leave no room for variability. Every wafer, sublot, recipe, and tool event must be captured with precision to protect yield, ensure compliance, and secure IP.

Our platform brings R&D labs, pilot lines, and high-volume fabs into a single configurable system that adapts to rapid technology shifts, supports clean-room production demands, and delivers 24/7 visibility into metrology data, defect trends, and process drift—enabling faster, smarter decisions in an increasingly competitive market.

Digitally Transform for Modern Semiconductor Operation

No-Code, Configuration-Driven MES Controls

Adapt workflows, define new data structures, update recipes, and manage batch processing without scripting or vendor delays. This approach is ideal for fast-moving fabs, MEMS development, and quantum computing research environments.

Real-Time SPC, Defect Tracking and Yield Optimization Tools

Live SPC, equipment monitoring, defect mapping, and automated process enforcement provide continuous visibility into yield trends, excursions, and process drift for faster, smarter decision-making.

Cleanroom-Ready MES Built for CHIPS Act, ITAR, CMMC and Semiconductor Compliance

Designed for ISO, ITAR, CMMC, DFARS, CHIPS Act, and secure program requirements with granular, role-based IP protection that supports safe collaboration across labs, suppliers, and government-funded partners.

MES Engineered for Microelectronics Complexity and Advanced Packaging

Supports advanced packaging, fan-out wafer-level packaging, MEMS, quantum devices, and subcomponent-level traceability while providing the precision required for cutting-edge R&D and next-generation production lines.

Scalable MES for Single-Lab Operations

Standardize processes across R&D labs, pilot lines, and high-volume fabs while maintaining consistent traceability, secure collaboration, and validation integrity as operations expand.

Integrated Asset Management & Equipment Uptime Control

Extend MES visibility to critical tools, test equipment, and cleanroom assets. Monitor calibration status, manage preventive maintenance schedules, and reduce unplanned downtime with real-time asset performance tracking. Support CAPEX utilization and yield performance goals with full lifecycle asset intelligence.

Advanced MES Capabilities for Semiconductor and Microelectronics Shop Floor

TME® gives semiconductor and microelectronics teams a single platform to meet all Reliability, Availability, and Maintainability (RAM) objectives—streamlining operations from R&D labs to full-scale fabrication. Every tool, process, wafer, and material interaction is tracked, analyzed, and controlled with precision, empowering your team to scale confidently without adding operational burden.

MES for Real-Time Production Tracking, Routing and Wafer-Level Control

Gain continuous visibility into every wafer and sublot across the full process flow—from lithography and Chemical Mechanical Planarization (CMP) to metrology, test, and advanced packaging stages including fan-out wafer-level packaging (FOWLP) and 3D integration.

With integrated equipment connections via SECS/GEM, OPC UA, and APIs, our platform enforces recipe parameters, routing logic, time-out-of-environment rules, and cleanroom controls without manual oversight.

What this unlocks:

Multi-project wafer tracking (100+ customers/wafer)
Automated process enforcement for 70+ semiconductor steps, including MEMS fabrication and quantum computing device development
Live WIP dashboards and electronic travelers
Conditional logic to reduce delays and prevent process drift
Batch processing management with full genealogy tracking

Whether you operate a research lab, pilot line, or production wafer fab, TME® ensures process consistency at every stage.

Semiconductor Quality Management & Customer Compliance Tools

Quality in semiconductors hinges on tight control of variation and complete visibility into defects.

Our solution integrates SPC/SQC, inline data capture, inspection workflows, and automated hold logic to detect deviations early—protecting yield, preventing scrap, and supporting customer-specific compliance requirements.

Key capabilities:

SPC-based process monitoring across all fabrication stages
Automated routing holds and deviation management
Complete defect tracking across the entire process
Subcomponent-level quality control for advanced packaging
Customer-specific reporting for audit readiness

Equipment Monitoring and SEMI E10 Maintenance Management

Driven by SEMI E10 equipment state modeling, we provide a unified view of equipment performance, tool availability, and maintenance needs across the fab or campus.

What this enables:

Real-time tool state visibility (E10-compliant)
Predictive and preventive maintenance scheduling
Cross-site asset tracking and calibration control
Reduced downtime and improved equipment reliability

This ensures that critical equipment—from lithography steppers to metrology tools—remains production-ready at all times.

Inventory Management & Material Management for Cleanrooms

From wafers and chemicals to FOUPs, masks, and consumables, semiconductor operations depend on precise and compliant material control.

Our solution manages inventory at the location, sublot, and container level, ensuring the right materials are available exactly when needed.

Benefits:

End-to-end material genealogy
Time-out-of-environment and expiration control
FEFO inventory logic
Real-time visibility for supply chain and purchasing

This level of control shortens lead times, reduces material waste, and aligns inventory practices with semiconductor-grade quality standards.

Real-Time MES Reporting, Yield Dashboards and Performance Analytics

Gain real-time insights into throughput, cycle times, utilization, yield, and defect trends across your entire operation.

Examples include:

Equipment utilization and bottleneck identification
Yield dashboards with sublot granularity
Root-cause analysis for process optimization
KPI tracking across R&D, pilot, and production environments

These insights help teams eliminate inefficiencies and accelerate continuous improvement.

Audit Trails & End-to-End Traceability

When it comes to audits and compliance, traceability is imperative.

Gain a complete digital history of every:

Wafer & sublot
Process step
Equipment interaction
Material movement
Recipe revision
Operator action

Every action is logged automatically, creating a defensible audit trail from wafer start to final test, including FOUP and carrier tracking.

This ensures instant audit readiness for ISO, ITAR, CMMC, customer-specific audits, and government compliance programs including CHIPS Act reporting.

Automated Compliance & Regulatory Management

Our audit-ready solution enforces compliance across recipes, parameters, workflows, and environmental controls to ensure each run meets internal and external quality expectations.

Supports: